Comparison of the sputter rates of oxide films relative to the sputter rate of SiO2

By D. Baer, M. Engelhard, A. S. Lea, P. Nachimuthu, T. Droubay, Jiyoung Kim, Bongki Lee, C. Mathews, R. Opila, L. Saraf and 3 more. 2010

137 citations recorded by the source corpus.

Subfields: Computational Mechanics, Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/17f606610aeb107070306c3f8fa04ae68c2f982b