In-plane MEMS-based nano-g accelerometer with sub-wavelength optical resonant sensor
By U. Krishnamoorthy, Roy H. Olsson III, G. Bogart, M. Baker, D. Carr, T. Swiler, P. Clews. 2008
167 citations recorded by the source corpus.
Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/17605eb90cc4e84c4966b002eaf3a1e46421dd82
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In Atomic and Molecular Physics, and Optics
In Electrical and Electronic Engineering
Citations in the corpus
- High-Index-Contrast Grating (HCG) and Its Applications in Optoelectronic Devices (2009, background): “in microelectromechanical systems (MEMS) for highly sensitive displacement sensors [19]–[21].”