Nucleation and Growth during Al2O3 Atomic Layer Deposition on Polymers

By Christopher A. Wilson, R. K. Grubbs, S. George. 2005

411 citations recorded by the source corpus.

Subfields: Bioengineering, Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/16ce58cf2c25e45fa6215be9e896596caa9577cb

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1. Xiaoting Wang
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Citations in the corpus

• PVDF membranes with simultaneously enhanced permeability and selectivity by breaking the tradeoff effect via atomic layer deposition of TiO2 (2013, background): “In the ALD process, the TiCl4 molecules are not only chemically adsorbed onto the membrane surface but also penetrate into the subsurface of the membrane and are entrapped in the free volumes between the PVDF chains [30].”