Metallic NEMS components fabricated from nanocomposite Al–Mo films

By Zonghoon Lee, C. Ophus, L. Fischer, N. Nelson-Fitzpatrick, K. Westra, Stephane Evoy, Velimir Radmilovic, U. Dahmen, David Mitlin. 2006

269 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/1623edbe3e1e4aedac5884f42ab93ad82763eb96

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In Atomic and Molecular Physics, and Optics

In Electrical and Electronic Engineering

In Mechanics of Materials

Citations in the corpus

Geometrically nonlinear isogeometric analysis of functionally graded microplates with the modified couple stress theory (2017, background): “Those small-scale structures have created new challenges in modelling, for instance, when one attempts to investigate the structural behaviours of elements in micro- and nano-electro-mechanical systems [2, 3], carbon nanotube actuators [4], space and bio-engineering [5].”
A nonlocal zeroth-order shear deformation theory for free vibration of functionally graded nanoscale plates resting on elastic foundation (2016, background): “…nano-sized system and devices such as sensors, nanowires, atomic force microscopes, actuators, thin films to improve their performances (Fu et al. 2003, Lee et al. 2006, Lu et al. 2011, Lun et al. 2006, Moser and Gijs 2007, Rahaeifard et al. 2009, Stölken and Evans 1998, Witvrouw and Mehta 2005).”
A size-dependent four variable refined plate model for functionally graded microplates based on modified couple stress theory (2015, background): “Recently, the applications of FGMs have been extended to the micro/nano engineering fields so that functionally graded (FG) micro/nano beams and plates are extensively utilized in atomic force microscopy and micro- and nano-electro-mechanical systems (MEMS and NEMS) [1–4].”
Size-dependent axial buckling analysis of functionally graded circular cylindrical microshells based on the modified strain gradient elasticity theory (2014, background): “Recently, the use of FGMs in micro- and nanodevices such as thin films in the form of shape memory alloys [7], micro- and nano-electromechanical systems (MEMS and NEMS) [8–10] and also atomic force microscopes (AFMs) has been extensively reported in the literature.”
The modified couple stress functionally graded Timoshenko beam formulation (2011, background): “Beams used in MEMS, NEMS and AFMs, have the thickness in the order of microns and sub-microns, so that the small scale effects in their behavior is considerable.”