Simple fabrication scheme for sub-10 nm electrode gaps using electron-beam lithography

By K. Liu, Phaedon Avouris, J. Bucchignano, Richard Martel, Shouheng Sun, J. Michl. 2002

170 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/15d7a2954e8ac84c12ed281794bf63e8418a6848