Conversion of Some Siloxane Polymers to Silicon Oxide by UV/Ozone Photochemical Processes

By M. Ouyang, C. Yuan, R. Muisener, A. Boulares, J. Koberstein. 2000

230 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry, Renewable Energy, Sustainability and the Environment

View Paper: https://www.semanticscholar.org/paper/1530f960a770f7bc94288986f6431c39203e3969

How researchers see this paper

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In Electrical and Electronic Engineering

  1. K. Efimenko
  2. A. Fery
  3. A. Schweikart
  4. J. Genzer

In Materials Chemistry

  1. K. Efimenko
  2. Ashkan Vaziri
  3. J. Genzer

Citations in the corpus