EFFECTS OF HEAT TREATMENT ON PROPERTIES OF ITO FILMS PREPARED BY RF MAGNETRON SPUTTERING

By Yalan Hu, X. Diao, Cong Wang, W. Hao, Tian-min Wang. 2004

243 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Computational Mechanics, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/14a1cbd3f6dd8480524ba397aa47fee7f62d83a5