Materials issues in microelectromechanical devices: science, engineering, manufacturability and reliability

By A. Romig, Michael T. Dugger, P. McWhorter. 2003

165 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/13a61171c708982532922395c6669f02e4eb675a

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Z. Bojar
2. W. Polkowski
3. T. Jacobs
4. P. Jóźwik
5. Robert W. Carpick
6. Bernd Gotsmann
7. Mark A. Lantz

In Biomedical Engineering

1. Z. Bojar
2. W. Polkowski
3. T. Jacobs
4. P. Jóźwik
5. Robert W. Carpick
6. Bernd Gotsmann
7. Mark A. Lantz

In Electrical and Electronic Engineering

1. Z. Bojar
2. W. Polkowski
3. P. Jóźwik

Citations in the corpus

• Applications of Ni3Al Based Intermetallic Alloys—Current Stage and Potential Perceptivities (2015, methodology): “Micromachines made in the MEMS technology: (a) SEM microphotographs of the beam and anchored post of sidewall tribometer from electrostatic actuators and (b) a top view during data collection in the optical microscope (reprinted with permission from Elsevier, 2003 [127]); (c) a surface micromachined”
• On the Application of Transition State Theory to Atomic-Scale Wear (2010, background): “Already, microelectromechanical systems (MEMS) with gears or other sliding contacts demonstrate unacceptably low lifetimes due to wear; such issues are exacerbated as dimensions shrink into the nanometer scale [1–3].”