Integrated waveguide coupled Si_3N_4 resonators in the ultrahigh-Q regime

By D. Spencer, J. Bauters, Martijn J. R. Heck, John E. Bowers. 2014

247 citations recorded by the source corpus.

The vast majority of work on waveguide-coupled resonators focuses on decreasing losses in the waveguide and coupling region. Here we present fully integrated resonators based on an ultralow-loss Si3N4 waveguide platform. By tailoring the directional coupler excitation to the resonators, we are able to achieve lower loss single-mode coupling to multimode waveguide widths compared to straight bus waveguide directional couplers. This allows us to demonstrate record-high integrated waveguide coupled intrinsic quality factor (Qint) values of 81 million at a 9.65 mm bend radius, with a future direction to both stronger and lower loss waveguide–resonator coupling. This result opens up integration possibilities for narrow linewidth integrated diode lasers, low noise feedback systems, microwave photonic research, and the ultrastable timing reference community.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/13a07e463fa0a86fcdffe4c702858a6a099e6026

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Andrew M. Weiner
2. Daniel E. Leaird
3. Xiaoxiao Xue
4. Jian Wang
5. L. Varghese
6. Yi Xuan
7. Minghao Qi
8. Yang Liu

In Electrical and Electronic Engineering

1. Andrew M. Weiner
2. Xiaoxiao Xue
3. Daniel E. Leaird
4. Yi Xuan
5. Minghao Qi
6. Jian Wang
7. Yang Liu
8. Pei-Hsun Wang

Citations in the corpus

• Silicon Nitride in Silicon Photonics (2018, unknown): “3 dB/m [57].”
• High-Q silicon nitride microresonators exhibiting low-power frequency comb initiation (2016, background): “In this report, no effort is attempted to quantify such excess coupling loss and it will be treated as part of the roundtrip loss; thus, the extracted intrinsic quality factors (Q int) will be underestimated [36].”
• Low-loss silicon platform for broadband mid-infrared photonics (2017, unknown): “Gradual bending radii and transition to the pulley coupling region are included to minimize higher order mode coupling [52 – 54].”