Spatial atomic layer deposition: A route towards further industrialization of atomic layer deposition

By P. Poodt, D. Cameron, E. Dickey, S. George, V. Kuznetsov, G. Parsons, F. Roozeboom, Ganesh Sundaram, A. Vermeer. 2012

355 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/12e445837ee56de2d888e31781a389087f2e485a