Ultraprecision CMP for sapphire, GaN, and SiC for advanced optoelectronics materials

By H. Aida, Toshiro Doi, H. Takeda, Haruji Katakura, Seong-Woo Kim, K. Koyama, T. Yamazaki, M. Uneda. 2012

246 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/11f5469d4d63779b79748e21789b3063195201a1