Three-dimensional nanostructure fabrication by focused-Ion-beam chemical vapor deposition

By S. Matsui, R. Kometani. TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664), 2000

440 citations recorded by the source corpus.

Subfields: Computational Mechanics, Materials Chemistry, Structural Biology

View Paper: https://www.semanticscholar.org/paper/107fd4b28aafb2ce79b2d92e9c410defeb821554