Templated fabrication of large area subwavelength antireflection gratings on silicon
By Chih-Hung Sun, Wei-Lun Min, N. Linn, Peng Jiang, B. Jiang. 2007
147 citations recorded by the source corpus.
We report a cheap and scalable bottom-up technique for fabricating wafer-scale, subwavelength-structured antireflection coatings on single-crystalline silicon substrates. Spin-coated monolayer colloidal crystals are utilized as shadow masks to generate metallic nanohole arrays. Inverted pyramid arrays in silicon can then be templated against nanoholes by anisotropic wet etching. The resulting subwavelength gratings greatly suppress specular reflection at normal incidence. The reflection spectra for flat silicon and the templated gratings at long wavelengths agree well with the simulated results using a rigorous coupled wave analysis model. These subwavelength gratings are of great technological importance in crystalline silicon solar cells.
Subfields: Biomedical Engineering, Electrical and Electronic Engineering, Surfaces, Coatings and Films
View Paper: https://www.semanticscholar.org/paper/1024d3ee2e602b38ee977a7b200f0da67f6bfc9f
How researchers see this paper
The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.
In Electrical and Electronic Engineering
In Surfaces, Coatings and Films
Citations in the corpus
- Growth of vertically aligned ZnO nanorod arrays as anti-reflection layer in silicon solar cell (2010, background): “Recently, versatile SWSs have emerged as promising candidates for AR coatings such as etching with self-aggregated nanodot mask [4,5], moth-eye-like fabrication [6,7], and nanostructures employing oblique-angle deposition methods [8,9].”
- Excellent antireflection properties of vertical silicon nanowire arrays (2010, methodology): “To date, different methods have been employed to fabricate SWS surfaces [10–15].”
- Enhancement of the light conversion efficiency of silicon solar cells by using nanoimprint anti-reflection layer (2010, background): “Recently, versatile SWSs have emerged as promising candidates for AR coatings such as etching with self-aggregated nanodot mask [4,5], moth-eye like fabrication [6,7], nanorod fabrication [8–10], and nanostructures employing oblique-angle deposition methods [11,12].”