A thin-film sensing element for ozone, humidity and temperature

By W. Qu, Wojtek Wlodarski. 2000

162 citations recorded by the source corpus.

Subfields: Bioengineering, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/0e981f8282aa7c12062115b15072741031c35ef2