Plasma-based ion implantation and deposition: a review of physics, technology, and applications

By J. Pelletier, A. Anders. IEEE Transactions on Plasma Science, 2005

175 citations recorded by the source corpus.

Subfields: Materials Chemistry, Mechanical Engineering, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/0e78271a3752e8b86b1ee0c9ef97e122a5219f4c

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

1. Hidenori Akiyama
2. T. Sakugawa
3. K. Takaki
4. Y. Minamitani
5. N. Shimomura
6. T. Namihira

Citations in the corpus

• Industrial Applications of Pulsed Power Technology (2007, background): “Difficulty in the treatment of inner surfaces is the production of the plasma and the negative pulse bias of the inner surface [80].”