Resistless patterning of sub-micron structures by evaporation through nanostencils

By J. Brugger, J. Berenschot, S. Kuiper, W. Nijdam, B. Otter, M. Elwenspoek. 2000

139 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering

View Paper: https://www.semanticscholar.org/paper/0c3e55fa743bcaa26921454c26aa63089a702791

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1. K. Venkatakrishnan
2. B. Tan

Citations in the corpus

• Nanostructured surfaces: challenges and frontiers in nanotechnology (2004, unknown): “Among these, the author’s group is working on several fronts in parallel, including deposition through a shadow mask (see, for example, Lüthi et al 1999, Brügger et al 2000), substrate patterning using NIL (Chou et al 1996) and using nanostructured surfaces as templates for growth.”
• A femtosecond laser-induced periodical surface structure on crystalline silicon (2006, background): “The uniformly spaced ripple structure is of great research interest because of potential applications in MEMS.”