Miniaturized Thermoelectric Generators Based on Poly-Si and Poly-SiGe Surface Micromachining

By M. Strasser, R. Aigner, M. Franosch, G. Wachutka. 2002

211 citations recorded by the source corpus.

Subfields: Civil and Structural Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/09ce853594847a7961c1f5bfab84319fa2ca60cb

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Civil and Structural Engineering

1. W. Glatz
2. Christofer Hierold
3. Chengkuo Lee

In Materials Chemistry

1. H. Feng
2. W. Glatz
3. Christofer Hierold
4. Chengkuo Lee
5. Jin Xie

Citations in the corpus

• $\hbox{Bi}_{2}\hbox{Te}_{3}$-Based Flexible Micro Thermoelectric Generator With Optimized Design (2009, methodology): “The vertical heat flow was obtained by integration of microcavities in the substrate underneath the TCs [3], [4], by folding a sheet with planar TCs into a wavelike shape [5], [6], or by vertical assembly of planar TC modules [7], [8] as shown in Fig.”
• Design, Fabrication, and Characterization of CMOS MEMS-Based Thermoelectric Power Generators (2010, background): “As we can see, the vacuum cavity has become an effective approach to increase the performance of TPGs. Recently, researchers have proposed technologies for low-temperature wafer-level sealing technology for creating sealed vacuum cavities.”