Surface stress model for intrinsic stresses in thin films

By R. Cammarata, Todd Trimble, David J. Srolovitz. 2000

203 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/08aae8c755d0ed0ab266b13cc8b91c150f2b2bb5

How researchers see this paper

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In Mechanics of Materials

1. C. C. Yu
2. Tungyang Chen
3. G. Dvorak

Citations in the corpus

• Size-dependent elastic properties of unidirectional nano-composites with interface stresses (2007, background): “Numerous studies focused on the subjects of thin film stress evolution during deposition (see, for example, Cammarata et al. [4], [ 5 ], Freund and Suresh [6] and the references contained therein).”