Design, fabrication, and measurement of high-sensitivity piezoelectric microelectromechanical systems accelerometers

By L.-P. Wang, R. Wolf, Yu Wang, K. Deng, L. Zou, R. Davis, Susan E. Trolier-McKinstry. 2003

146 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/0681088f0659ccac4566089ce4f9e4ee8e91be63