Biaxial alignment in sputter deposited thin films

By S. Mahieu, P. Ghekiere, D. Depla, R. Gryse. 2006

428 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Mechanics of Materials, Surfaces, Coatings and Films

View Paper: https://www.semanticscholar.org/paper/059795f036086fa04347becf21bcb4d832026650

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. A. González‐Elipe
2. Á. Barranco
3. A. Borrás
4. A. Palmero

In Mechanics of Materials

1. A. González‐Elipe
2. Á. Barranco
3. A. Borrás
4. A. Palmero

In Surfaces, Coatings and Films

1. A. González‐Elipe
2. Á. Barranco
3. A. Borrás
4. A. Palmero

Citations in the corpus

• Perspectives on oblique angle deposition of thin films: From fundamentals to devices (2016, background): “This strong dependence that the crystalline structure of OAD thin films has on the experimental parameters means that although some trends in texture can be predicted [11,161], significant deviations associated with the use of different deposition conditions and/or techniques (e.”