Tunable infrared detector with integrated micromachined Fabry-Perot filter
By N. Neumann, M. Ebermann, K. Hiller, S. Kurth. SPIE MOEMS-MEMS, 2007
160 citations recorded by the source corpus.
Subfields: Biomedical Engineering, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/05833a91ef3c90e92653f17c1ea37fbbc74ecc2e
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In Biomedical Engineering
In Electrical and Electronic Engineering
Citations in the corpus
- Optical gas sensing: a review (2012, methodology): “For example, Neumann et al have developed and commercialized a tunable Fabry–Perot filter to replace the discrete filters typical of NDIR detector modules [157].”
- Miniaturization of optical spectrometers (2021, background): “Over the past two decades, miniaturized, MEMS-based tunable filters and Fourier transform spectrometers as well as centimeter-scale, packaged, grating-based systems have become commercially available (3, 22, 23, 42, 111, 112).”