Handbook of Semiconductor Manufacturing Technology

By M. Henini. 2001

217 citations recorded by the source corpus.

Subfields: Industrial and Manufacturing Engineering, ML Systems & Hardware

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Industrial and Manufacturing Engineering

1. Simon Lacoste-Julien
2. Venkat Srinivasan
3. Pradeep R. Guduru
4. M. Chon
5. V. Sethuraman
6. M. Shimshak
7. François Soumis

In ML Systems & Hardware

1. Simon Lacoste-Julien
2. Venkat Srinivasan
3. Pradeep R. Guduru
4. M. Chon
5. V. Sethuraman
6. M. Shimshak

Citations in the corpus

• Repurposing Pretrained Models for Robust Out-of-domain Few-Shot Learning (2021, background): “For example, in semiconductor manufacturing (Nishi & Doering, 2000), collecting each new data point is costly and time consuming because it requires setting up a new manufacturing process accordingly.”
• In situ measurements of stress evolution in silicon thin films during electrochemical lithiation and delithiation (2010, methodology): “In the Stoney equation, Young’s modulus and Poisson’s ratio corresponding to Si (1 1 1) plane were used [25,26].”