Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices

By A. Krauss, O. Auciello, D. Gruen, A. Jayatissa, Anirudha V. Sumant, J. Tucek, D. Mancini, N. Moldovan, A. Erdemir, D. Ersoy and 4 more. 2001

347 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Materials Chemistry, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/04a56192320897c5f148557fa1ec0ab3bceac2f8

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

  1. T. Jacobs
  2. Robert W. Carpick
  3. A. Erdemir

In Materials Chemistry

  1. O. Eryilmaz
  2. A. Erdemir
  3. J. Harrison
  4. T. Jacobs
  5. Robert W. Carpick

In Mechanics of Materials

  1. O. Eryilmaz
  2. A. Erdemir
  3. J. Harrison
  4. T. Jacobs
  5. Robert W. Carpick
  6. A. Rosenkranz

Citations in the corpus