A comparative micro-cantilever study of the mechanical behavior of silicon based passivation films
By K. Matoy, H. Schönherr, T. Detzel, T. Schöberl, R. Pippan, C. Motz, G. Dehm. 2009
275 citations recorded by the source corpus.
Subfields: Biomedical Engineering, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/0472159479b53d9858282569c6993f47f1ee4504
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In Biomedical Engineering
In Electrical and Electronic Engineering
Citations in the corpus
- A review of experimental approaches to fracture toughness evaluation at the micro-scale (2019, background): “For the rectangular cantilever with a straight through notch it was shown that slight deviations in width, thickness and bending length do not significantly influence the geometry function of the micro-cantilever expressed in terms of the argument of crack length to width ratio [46,57,58].”