A comparative micro-cantilever study of the mechanical behavior of silicon based passivation films

By K. Matoy, H. Schönherr, T. Detzel, T. Schöberl, R. Pippan, C. Motz, G. Dehm. 2009

275 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/0472159479b53d9858282569c6993f47f1ee4504

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In Biomedical Engineering

  1. M. Sebastiani

In Electrical and Electronic Engineering

  1. M. Sebastiani

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