Metal‐Assisted Chemical Etching of Silicon: A Review
By Zhipeng Huang, N. Geyer, P. Werner, J. de Boor, U. Gösele. Advances in Materials, 2011
1,767 citations recorded by the source corpus.
Subfields: Biomedical Engineering, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/0183ad785c68af7945a7e421e8daac68b4fdb1ec
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