Microscale material testing of single crystalline silicon: process effects on surface morphology and tensile strength

By Taechung Yi, Lu Li, Chang-Jin Kim. 2000

184 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/00da8742023bf83f9e3d44772c5a5271b80d6c7c